Handouts
Here you will find handouts, assignments, and other course-related materials that are complementary to the topics covered in class and provided in the texts section. You will need to use Adobe Acrobat Reader to access many of these.
Important Note: All handouts are password-protected and only UBC EECE students have access. Use your usual PC/Unix username and password to log in. If you don't have an account, you may find information on getting one here.
Lecture Notes
L01 - IntroductionL02 - History of MEMS, introduction to microfabrication
L03 - Introduction to micromachining
L04 - Surface micromachining. Thin film deposition
L05 - Deposition methods - part II
L06 - Removal of materials. Etching
L07 - Removal of material. Gas and plasma etching
L08 - Miller indices. Bulk micromachining
L09 - Biomedical microdevices (Prof. Mu Chiao)
L10 - Micro-EDM (Prof. Kenichi Takahata)
L11 - (Prof. John Madden)
L12 - Bulk Micromachining 2
L13 - MEMS foundries, fabrication processes
L14 - Electrical and mechanical concepts - piezoresistivity
L15 - Review discussions
15-10-2012 - Midterm !
L16,17 - Mechanics of materials for MEMS
L18 - MEMS springs
L19 - Piezoresistive sensors
L20-21 - Thermal principles and thermal actuation
L22 - Thermoresistive sensors A
L23 - Thermoresistive sensors B
L24 - Capacitive sensors (Nov 4)
L25 - Electrostatic actuators A (Nov 7)
L26 - Electrostatic actuators and sensors B (Nov 9)
L27 - Electrostatic actuators C (Nov 14)
L28 - Piezoelectric microdevices A (Nov 16)
L29 - Piezoelectric devices B (Nov 19)
L30 - Piezoelectric devices C (Nov 21)
L31 - SAW-based devices and applications (Nov 23)
L32 - Optical microdevices A (Nov 26)
L33 - Optical microdevices B (Nov 28)
L34 - Biomedical applications (Nov. 30)
Homework
Assignment 1 - due Sep 28th- Supporting software: Clewin mask editor: Clewin.zip (just unpack to your harddisk and run Clewin4.exe file)
Assignment 2 - due Oct 12th
Assignment 3 - due Oct 29th
Assignment 4 - due Friday, Nov 23rd
Assignment 5 - due Friday, Nov 30th
Assignment 6 - optional (+10%), due Dec 18th