| Lecture |
Content |
Download |
| Week 1 |
Introduction. Motivation, context,
microelectronics vs. MEMS vs microsystems
From physical
principles to structures and devices: microtransducer operation. Signal
domains, Transduction effects, Microsystem factors of merit, Transducer
operation techniques, Powering Microsystems. Scaling issues for MEMS. Markets
for Microsystems and MEMS. |
Wk01_Intro.pdf |
| Week 2 |
From
microdevices to Microsystems. Information processing systems
System level simulation of MEMS: information
flow versus energy coupling (across-through variables, bond graph)
representations. Structured MEMS design methodology. [Updated Jan 30, 2008!] |
Wk02_Modeling.pdf |
| Week 3 |
Lab 1: Introduction to Comsol Multiphysics - electro-thermal coupling example
Systematic modeling of physical systems as signal-flow representations
Representing information flow with energy-based (across-through) representations |
mini_course.x_t
CMPH_minicourse.pdf |
| Week 3 |
Microsensors in mechanical domain. Elasticity theory |
Wk03-04_Mechanical_p1.pdf |
| Week 4 |
Lab 2: Modeling ODEs and physical systems in Spice
Please download B2Spice from http://www.beigebag.com/form_stuv5.htm
. Once downloaded, run the installer to install the software on your
computer. See the link on the right column for the license. The manual
is available at http://216.144.192.118/site52/files/v5manual.zip as well. |
Spice_AD_v5.ldf
v5manual.zip
B2Spice |
| Week 5-6 |
Mechanical sensors: normal and shear stresses and strains, behavioral modeling. Examples: accelerometers and cantilevers |
Wk03-06_Mechanical_p1.pdf
Cantilever.pdf |
| Wk 7, Feb 18-22 |
Reading break |
|
Wk 8
|
Febr 26 - 3-5pm - Comsol Multiphysics hands-on workshop - with MEMS and microfluidics applications (MCLD359)
Febr 29, 9-10am - MIDTERM exam! - room MCLD254
Remarks:
-
Every student is allowed a double side cheat sheet, B4 letter size
(8.5''x11''), that will be attached to his/her exam paper at the end.
No calculators, textbooks or other materials are allowed. |
Wk01-03_Intro.pdf |
Wk 9
|
Latest seminar notes - Feb 27; related to the last year midterm |
08.02.27_Seminar.pdf
Midterm2007.pdf |
| Wk 10 |
Mechanical sensors, including AFM-based sensors |
Mechanical.pdf |
| Wk 11 |
AFM demonstration. Microgyroscopes and piezoresistive sensors |
Microgyroscopes_piezoresistive.pdf |
| Report guidelines
Homework | Report_guide.pdf
Homework.pdf |
| Wk 12 | Biomedical applications of MEMS | Biomedical.pdf |
| Revised version (with Miller indices) of the chapter on microgyroscopes and piezoresistive sensors. | Microgyroscopes_piezoresistive_2.pdf
|
| EXAM: Friday, April 25, 12:00 pm, room MCLD214
Duration: 1:30h
Topics: all the subjects discussed after the midterm (starting with large signal effects in MEMS capacitors) | |
| Example: the final exam given in 2006 (Attention: the topics discussed were slightly different!) | ECE490E_Exam2006.pdf |
EECE
491E & 571E