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ELEC465 & 544 course page

ELEC465 - Microsystems Design

ELEC544 - Advanced Microsystems design


credits: 3


Lectures - Laboratories - Tutorials [hrs/week]: 3-0-0 + homework assignments/projects
Several tutorials mayl be scheduled for getting acquainted with the design and simulation tools to be used in the assigned project


Dr. Edmond Cretu
Kaiser 3063
Phone: 604 827-4115
E-mail: edmondc at ece dot ubc dot ca
Office Hours: to be arranged online when required

Teaching Assistant

Amir H. Omidvar (Farhad)
E-mail: omidvar.a.h at gmail dot com


2020 Term 1 (Sep 8th, 2020 to Dec 3rd, 2020)

Monday, Wednesday, Friday, 10:00am-11:00am - online lectures

Course description

The course will introduce the students to MEMS-based microsystems, with an emphasis on an integrated perspective and systematic methods for the design and analysis of interdisciplinary systems at microscale. A structured top-down design methodology encompassing several levels (symbolic computation based on analytical modeling, reduced order macromodeling, finite element analysis and layout design) will be applied to design projects and case studies in the field of MEMS (micro-electromechanical systems). Available design and analysis tools (Matlab/Simulink/Simscape - for system level and circuit simulation,  Ansys/Comsol Multiphysics for FEA, Clewin for layout design) will be used during the project assignments.  The course will also introduce standard behavioral modeling languages (Simscape,VHDL-AMS, Modelica) used in current simulators.

calendar entry

Structured design practices in Microsystems; unified schematic representations across multiple energy domains; from physical limitations in MEMS to their interface with electronics; apply multiphysics design techniques to projects and case studies; introduction to behavioral modeling languages for mixed analog-digital system design.


None. The course is offered to graduate students from various disciplines of Engineering and Applied Science, where the problem of designing interdisciplinary systems at microscale is expected to achieve a key role. An introductory knowledge of MEMS (e.g. as presented in EECE402) is helpful but not required.

course materials

Lecture notes and articles will be provided in the classroom. Available e-books through UBC library portal (e.g., [1,2,3]  in the books list ) will be indicated to students. Additional information sources are listed below.


Complementary Books:
  1. 1.    Senturia, Stephen D [2002] “Microsystem Design,” Kluwer Academic
  2. 2.    Allen, James [2005] “Microelectromechanical System Design,” CRC Press
  3. 3.    Korvink, J.G., Paul, O. [2006] “MEMS: a  practical guide to design, analysis, and applications”, Springer
  4. 4.    Gad-el-Hak, Mohamed (ed.) [2005] “The MEMS Handbook 2nd ed.,” CRC Press
  5. 5.    Liu, Chang [2006] “Foundation of MEMS,” Pearson Prentice Hall
  6. 6.    Pelz, Georg [2003] “Mechatronic Systems. Modelling and simulation with HDLs,”, Wiley
  7. 7.    Lobontiu,N , Garcia, E. [2005] “Mechanics of Microelectromechanical Systems,” Kluwer Academic
  8. 8.    Ashenden, P., Peterson, G.D., Teegarden, D.A. [2003] “The System Designer’s Guide to VHDL-AMS,” Morgan Kaufman
  9. 9.    Verhoeven, C.J.M., van Staveren, et. al. [2003] “Structured Electronic Design. Negative-Feedback Amplifiers,” Kluwer Academic
  10. 10.    Leondes, Cornelius T. (ed.) [2006] “MEMS/NEMS Handbook. Techniques and Applications, vol.1-5 , Springer

  1. 1. IEEE/ASME Journal of Microelectromechanical Systems
  2. 2. IOP Journal of Micromechanics and Microengineering
  3. 3. Microsystem Technologies, Springer
  4. 4. Sensors and Actuators A-Physical & B-Chemical, Elsevier

Conference Proceedings:
  1. 1. IEEE International Conference on Solid-State Sensors and Actuators (Transducers)
  2. 2. IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS)
  3. 3. Modeling and Simulation of Microsystems (MSM)
  4. 4. Eurosensors
  5. 5. Solid-State Sensor, Actuator and Microsystems Workshop, (Hilton Head)

Grading scheme

Project assignment: 35%
Homework assignments: 15%
Final exam: 50%

Last updated 7 - Sep-2020

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