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Wk. 1
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Introduction:
Microelectronic circuits vs. MEMS vs. Microsystems.
From physical
principles to structures and devices: microtransducer operation. Signal
domains, Transduction effects, Microsystem factors of merit, Transducer
operation techniques, Powering Microsystems. Scaling issues for MEMS.
Markets for Microsystems and MEMS.
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Wk. 2
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From
microdevices to Microsystems. Information processing systems
System level simulation of
MEMS: information flow versus energy coupling (across-through
variables, bond graph) representations. Structured MEMS design
methodology.
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Wk. 3
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MEMS/NEMS
design and analysis levels: macromodeling, finite element analysis,
layout (design rules, technological imperfections). Introduction in
MEMS design tools and design flows: Comsol Multiphysics, MEMS Pro
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Wk. 4
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Architectures
for Microsystems: open-loop versus closed-loop. From Spice modeling to
Analog Hardware Description Languages (VHDL-AMS, Modelica). Case study: MEMS-based
gyroscope.
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Wk. 5
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Lumped
modeling in multiple energy domains. Energy-conserving transducers and
dissipative processes. Generic elements: gyrators, transformers,
nullors.
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Wk. 6
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Domain
specific details - Mechanical transducers
Elasticity,
beam bending, elastic suspensions, energy methods (variational methods,
Rayleigh-Ritz methods). Electromechanical coupling: n-port capacitors.
Damping in MEMS and mechano-thermal noise.
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Wk. 6
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Midterm exam. Circuit and
system issues. Interface circuitry and architectures. Noise analysis
techniques.
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Wk. 7
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Coupling
between behavioral level description and finite element analysis.
Reduced order macromodeling techniques. Case study: MEMS accelerometer
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Wk. 8
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Small signal
versus large signal analysis. Nonlinear coupling and instabilities in
MEMS devices.
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Wk. 9
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Piezoelectricity
and surface acoustic wave devices. Case studies
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Wk. 10
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Chemical and
biological transducers. From gas sensors to “lab-on-a-chip.”
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Wk. 11
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Packaging and
reliability. Measurement techniques for MEMS
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Wk. 12
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Conclusions.
Toward nano-scale effects and nanosystems. Projects presentations.
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ELEC 465 & 544